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Air-cooled heating furnace body

○ Product Details

1. Product Overview:

Air-cooled heating elements are primarily used in: horizontal diffusion/oxidation/annealing furnaces and other heating equipment as key heating components. They can be customized according to specific process requirements or designed and manufactured by our company to meet customer needs.


2. Product Parameters & Types:

Equipment Performance Indicators

1

Structural Type

Horizontal

2

Number of Temperature Control Points

1-9 Points

3

Heating Element Inner Diameter

150-450mm

4

Applicable Process

Diffusion (phosphorus diffusion, boron diffusion), oxidation (dry oxygen, synthesis), glass passivation (GPP), annealing, alloying, aluminum predeposition

5

Process Temperature Range

600-1280℃

6

Constant Temperature Zone Length

300-1200mm

7

Heating Wire Diameter

1-10mm

8

Heating Wire Brand

Beijing Shougang HRE/HYZ, Sweden Kanthal A-1/APM

9

Insulation Material

Morgan Ceramic Fiber Containing Zirconium

10

Outer Shell Material

SUS304/Aluminum

11

Outer Shell Cooling Structure

Air-Cooled


3. Main Features & Advantages

1★ The element body is made of high-quality high-temperature heating wire, with surface temperature maintained below 80°C.

2★ Internal temperature stability of ±0.5°C.

3★ Enables rapid cooling.

4★ Achieves a cooling rate of 7-10°C between 1100-800°C, significantly reducing production cycle time, improving efficiency, and addressing energy waste and water channel blockages common in conventional water-cooling systems.

○ Company Profile

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Qingdao Yuhao Microelectronics Equipment Co., Ltd. was established in 2008 as a high-tech enterprise integrating R&D, manufacturing, and sales. The company specializes in electric heating furnace equipment, heating furnace thermal fields, and graphite tool processing. Our products and services cater to various industries including electronic components, semiconductor materials, and solar photovoltaic sectors.

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Yuhao is a national high-tech enterprise and a provincial specialized and innovative SME. We hold trademark registration rights and import/export operation licenses, having passed ISO9001 quality management system certification with over 50 patents.

○ Company Certifications

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