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Vacuum Seal Welding (Deoxidizing) Furnace

○ Product Details

I. Product Application

Primarily used for 3-6 inch epitaxial growth of III-V compound semiconductor crystals under high vacuum conditions, featuring oxygen-free tube sealing process and automated control system.


II. Key Parameters:

Equipment Performance Indicators

1

Number of Workstations

1 tube (customizable based on production process design)

2

Rated Temperature

1000℃

3

Processable crystal material dimensions

2-6 inch

4

Operating vacuum level

≤10X10-4Pa (adjustable)

5

Alarm Methods

Over-temperature alarm, broken thermocouple alarm, vacuum fault alarm, abnormal chamber pressure alarm.

6

Control System Structure

Integrated Industrial Computer + PLC


III. Main Features and Advantages

1. Capable of querying historical temperature records, including historical data and temperature curves.

2. Curve viewing function: Supports temperature, gas, power, and vacuum level monitoring.

3. Manual/automatic control: Enables temperature, gas, power settings, and valve switching control.

4. Alarm monitoring: Allows querying of alarm types.

5. Power limit protection: Different maximum power settings for different temperatures.

6. Hierarchical management: Parameters can be modified based on login credentials.

7. Data export: Temperature and flow data can be exported to USB drives.

The hardware system offers flexible expandability, facilitating additional functions like boat drive control and gas flow monitoring for various furnace configurations.

○ Company Profile

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Qingdao Yuhao Microelectronics Equipment Co., Ltd. was established in 2008 as a high-tech enterprise integrating R&D, manufacturing, and sales. The company specializes in electric heating furnace equipment, heating furnace thermal fields, and graphite tool processing. Our products and services cater to various industries including electronic components, semiconductor materials, and solar photovoltaic sectors.

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Yuhao is a national high-tech enterprise and a provincial specialized and innovative SME. We hold trademark registration rights and import/export operation licenses, having passed ISO9001 quality management system certification with over 50 patents.

○ Company Certifications

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