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Specialized heating furnace body for photovoltaic diffusion furnace

○ Product Details

1. Product Overview:

Diffusion furnace heating elements are mainly used in the photovoltaic industry for wafer processing: horizontal diffusion/oxidation/annealing furnaces and other heating equipment. They can be custom-made according to specific process requirements or designed by our company to meet customer needs.


2. Product Parameters & Types:

Equipment Performance Indicators

1

Structure Type

Horizontal/Water-Cooled

2

Number of Temperature Control Points

1-9 Points

3

Heating Element Inner Diameter

>450mm

4

Applicable Process

Diffusion (phosphorus diffusion, boron diffusion), oxidation (dry oxygen, synthesis), glass passivation (GPP), annealing, alloying, aluminum predeposition

5

Process Temperature Range

600-1280℃

6

Constant Temperature Zone Length

>2500mm

7

Heating Wire Diameter

1-10mm

8

Heating Wire Brand

Beijing Shougang HRE/HYZ, Sweden Kanthal A-1/APM

9

Insulation Material

Morgan Ceramic Fiber with Zirconium

10

Shell Material

SUS304/Aluminum


3. Main Features & Advantages

1★ Heating elements use Kanthal heating wire from Sweden, with thermal insulation cotton from Morgan UK, allowing long-term use at temperatures up to 1300°C. Within one year, the heating element will not experience sagging or cracking.

2★ Internal temperature stability of ±0.5°C.

○ Company Profile

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Qingdao Yuhao Microelectronics Equipment Co., Ltd. was established in 2008 as a high-tech enterprise integrating R&D, manufacturing, and sales. The company specializes in electric heating furnace equipment, heating furnace thermal fields, and graphite tool processing. Our products and services cater to various industries including electronic components, semiconductor materials, and solar photovoltaic sectors.

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Yuhao is a national high-tech enterprise and a provincial specialized and innovative SME. We hold trademark registration rights and import/export operation licenses, having passed ISO9001 quality management system certification with over 50 patents.

○ Company Certifications

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